Largest · Industry · ranked by net assets

The largest Semiconductor ETFs

There are 36 US-listed semiconductor ETFs, with $171.71B in combined net assets.

The largest is VanEck Semiconductor ETF (SMH) at $77.20B, followed by SOXX at $47.82B.

Expense ratios run from 0.15% to 1.87% a year (median 1%).

The 10 largest

The largest Semiconductor ETFs
# Fund 30 daysNet assetsCostYieldYTD1 yr3 yr5 yr
1 SMH VanEck Semiconductor ETF $77.20B0.35%0.22%+41.1%+40.5%+52.2%+30.2%
2 SOXX iShares Semiconductor ETF $47.82B0.33%0.09%+50.9%+48.5%+44.1%+23.7%
3 SOXL Direxion Daily Semiconductor Bull 3x Shares Leveraged $19.44B0.75%0.13%+62.3%+42.8%+59.5%+6.3%
4 NVDL GraniteShares 2x Long NVDA Daily ETF Leveraged $4.05B1.64%0%+12.2%+1.8%+106.1%—
5 XSD SPDR S&P Semiconductor ETF $3.48B0.35%0.16%+51.0%+37.4%+41.8%+18.5%
6 SOXQ Invesco PHLX Semiconductor ETF $3.00B0.19%0.32%+62.5%+60.9%+53.6%—
7 FTXL First Trust Nasdaq Semiconductor ETF $2.75B0.6%0.07%+76.6%+81.9%+54.2%+28.3%
8 USD ProShares Ultra Semiconductors Leveraged $2.67B0.94%0.51%+54.3%+43.3%+69.5%+33.6%
9 PSI Invesco Semiconductors ETF $2.38B0.55%0.02%+62.3%+65.1%+49.1%+24.5%
10 AMDL GraniteShares 2x Long AMD Daily ETF Leveraged $1.66B1.87%—+311.3%+161.0%——

Returns are total returns with distributions reinvested (3 and 5 years annualized), as of Nov 2, 2026.

How the top 5 compare

    Growth of each fund’s value from the start of the range, distributions reinvested. The dashed gray line is the S&P 500 (SPY).

    All 36 Semiconductor ETFs

    Largest first. Click a heading to sort.

    All Semiconductor ETFs
    Fund IssuerNet assetsCostYieldYTD1 yr5 yr
    SMH VanEck Semiconductor ETF VanEck$77.20B0.35%0.22%+41.1%+40.5%+30.2%
    SOXX iShares Semiconductor ETF iShares$47.82B0.33%0.09%+50.9%+48.5%+23.7%
    SOXL Direxion Daily Semiconductor Bull 3x Shares Leveraged Direxion$19.44B0.75%0.13%+62.3%+42.8%+6.3%
    NVDL GraniteShares 2x Long NVDA Daily ETF Leveraged GraniteShares$4.05B1.64%0%+12.2%+1.8%—
    XSD SPDR S&P Semiconductor ETF SPDR (State Street)$3.48B0.35%0.16%+51.0%+37.4%+18.5%
    SOXQ Invesco PHLX Semiconductor ETF Invesco$3.00B0.19%0.32%+62.5%+60.9%—
    FTXL First Trust Nasdaq Semiconductor ETF First Trust$2.75B0.6%0.07%+76.6%+81.9%+28.3%
    USD ProShares Ultra Semiconductors Leveraged ProShares$2.67B0.94%0.51%+54.3%+43.3%+33.6%
    PSI Invesco Semiconductors ETF Invesco$2.38B0.55%0.02%+62.3%+65.1%+24.5%
    AMDL GraniteShares 2x Long AMD Daily ETF Leveraged GraniteShares$1.66B1.87%—+311.3%+161.0%—
    SOXS Direxion Daily Semiconductor Bear 3x Shares Inverse Direxion$1.61B1%25.74%-92.2%-92.7%-78.6%
    NVDY YieldMax NVDA Option Income Strategy ETF Tidal Financial Group$1.36B1.09%52.74%+16.3%+15.7%—
    CHPY YieldMax Semiconductor Portfolio Option Income ETF Tidal Financial Group$1.02B1.03%19.18%-9.4%——
    TSMX Direxion Daily TSM Bull 2X Shares Leveraged Direxion$603.4M0.99%5.28%+66.5%+67.5%—
    NVDU Direxion Daily NVDA Bull 2X Shares Leveraged Direxion$521.4M0.92%5.42%+12.8%+2.2%—
    NVDX T-Rex 2X Long NVIDIA Daily Target ETF Leveraged Tuttle Capital Management LLC$457.9M1.05%3.08%+8.0%-3.3%—
    AMDY YieldMax AMD Option Income Strategy ETF Tidal Financial Group$382.8M1%65.4%+112.8%+67.9%—
    SMHX VanEck Fabless Semiconductor ETF VanEck$297.0M0.35%0.02%+46.2%+34.0%—
    SHOC Strive U.S. Semiconductor ETF ETF Architect$278.1M0.4%0.12%+48.1%+48.0%—
    TSMY YieldMax TSM Option Income Strategy ETF Tidal Financial Group$104.4M1.01%49.05%+36.8%+38.4%—
    CHPS Xtrackers Semiconductor Select Equity ETF Deutsche Bank AG$89.6M0.15%0.37%+70.0%+75.7%—
    AMUU Direxion Daily AMD Bull 2X Shares ETF Leveraged Direxion$82.0M1.06%3.57%+318.5%+164.7%—
    TSMU GraniteShares 2x Long TSM Daily ETF Leveraged GraniteShares$64.4M1.53%—+60.1%+59.9%—
    SOXY YieldMax Target 12 Semiconductor Option Income ETF Tidal Financial Group$64.0M1.06%4.44%-8.8%——
    NVD GraniteShares 2x Short NVDA Daily ETF Inverse GraniteShares$60.7M1.3%21.63%-45.0%-45.7%—

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